China-based equipment maker, SC SOLAR, has launched new cluster-type evaporation equipment specially suited for perovskite solar cells.
SC SOLAR has been working towards establishing an intelligent equipment manufacturing center, located in Suzhou. It is meant for assembling high-end photovoltaic module production lines and also for establishing an R&D center for heterojunction and perovskite tandem cells development.
SC SOLAR's cluster-type tool features single or multiple substrate cassette load locks and allow process recipe steps to be completed in vacuum without exposing the substrate to atmosphere. It provides the ability to automatically process substrates sequentially one at a time or in parallel to increase throughput. Substrate tracking ability is available and full process datalogging is standard.